Vincent Puyal, Daniela Dragomirescu, Christina Villeneuve, Jinyu Ruan, Patrick Pons, Robert Plana

This paper presents an approach to RF MEMS capacitive shunt switch design from K band up to W-band, based on the scalability of the RF MEMS switch with frequency. The parameters of the switch's equivalent circuit model also follow scaling rules. The measurement results of the fabricated switches show an excellent agreement with simulations which allow to validate the MEMS model in the entire band from 20 GHz up to 94 GHz. This model is going to be used in phase shifter circuit design for antenna array applications. First 60 GHz phase shifter results are also reported here.

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